多晶硅还原炉装备发展展望

Development Prospect of Polysilicon Reduction Furnace Equipment

基于改良西门子多晶硅生产工艺技术的关键设备众多,因此研究各类关键设备的特性是一件非常有意义的事情;还原炉作为最终产品的关键生产设备,其性能的好坏对多晶硅的生产有着举足轻重的作用,还原炉的大小、结构形式、材质等直接决定了多晶硅产品的品质、能耗等关键生产参数,因此本文就还原炉的特性进行分析,展望未来多晶硅还原炉的发展,旨在帮助各生产企业根据自身的发展需求选择合适的还原炉炉型。

There are many key equipment based on the improved Siemens polysilicon production technology,so it is of great significance to study the characteristics of various key equipment;As the key production equipment of the final product,the performance of the reduction furnace plays an important role in the production of polysilicon.The size,structure and material of the reduction furnace directly determine the quality of polysilicon products Energy consumption and other key production parameters,so this paper analyzes the characteristics of the reduction furnace,looks forward to the future development of polycrystalline silicon reduction furnace,in order to help manufacturers choose the appropriate reduction furnace type according to their own development needs.