一种新型三环定子多自由度超声电机

A Novel Three-ring Stator Multi-degree of Freedom Ultrasonic Motor

由于环形行波定子发展较为成熟,性能较为稳定,但只能实现单自由度旋转运动,对此提出了一种三环形定子多自由度球形超声电机,通过三个环形行波定子空间排布和激励电压的协调控制实现球形转子的三自由度运动。首先,详细介绍了三环形定子多自由度球形超声电机的结构及其所选材料;然后对环形行波定子和三环形定子多自由度球形超声电机进行理论分析,论证环形行波定子的驱动作用和三自由度运动的可行性;再通过有限元分析对环形行波定子进行模态和瞬态仿真;最后通过实验测试证明三环形定子多自由度球形超声电机,得出超声电机的输出性能,验证三环形定子多自由度球形超声电机的可行性。

At present,the development of the ring-shaped traveling wave stator is relatively mature and the performance is relatively stable,but only one single-degree-of-freedom rotational motion can be realized.In this paper,a three-ring stator multi-degree-of-freedom spherical ultrasonic motor is proposed.The threedegree-of-freedom motion of the spherical rotor is realized by the coordinated arrangement of three annular traveling wave stator spaces and excitation voltage.Firstly,the structure of the three-ring stator multi-degreeof-freedom spherical ultrasonic motor and its selected materials are introduced in detail.Then,theoretical analysis is carried out on the circular traveling wave stator and the three-ring stator multi-degree-of-freedom spherical ultrasonic motor to demonstrate the driving effect of the circular traveling wave stator and the feasibility of three-degree-of-freedom motion;The modal and transient simulations of the annular traveling wave stator are carried out by finite element analysis.Finally,the three-ring stator multi-degree-of-freedom spherical ultrasonic motor is proved by experimental test.The output performance of the ultrasonic motor is obtained,and the feasibility of the three-ring stator multi-degree-of-freedom spherical ultrasonic motor is verified.