基于浮动定子的直线运动平台减振与定位控制

Precise positioning control and vibration reduction of linear stage based on float stators

直线音圈电机驱动定位平台可避免机械耦合环节的引入,但其产生的振动将引起末端平台的响应,从而影响末端定位平台的定位精度.文中采用一种被动减振结构——浮动定子,与传统直线电机相比,浮动定子音圈电机可有效抑制惯性反冲力引起的振动,从而削弱前端振动对末端定位平台的影响.采用数字信号处理(programmable multi axis controller,PMAC)运动控制卡实现平台的运动控制,通过切换控制(PID与模糊控制的切换)实现运动平台的精密定位.实验结果表明:浮动定子类末端平台的振动相对减小,同时切换控制的应用提高了直线平台的定位精度.

A linear voice coil motor(VCM)can be used to eliminate mechanical coupling,but it will transmit vibration to the micro stage.So the positioning precision of the end-positioning stage will be affected.The paper describes a passive vibration structure-floating stator.The voice coil motor based on float-stator can effectively restrain vibration generated by inertia force compare with a fixed-stator.The performance of the end stage based on the float stator can be improved.Motion control is achieved by using PMAC motion card and switching control(between PID and fuzzy control)is used to realize precise positioning.The Experimental results show that vibration of the stage is reduced and the positioning accuracy is improved because of switching control.