物理气相沉积硬质涂层的开发及工程应用

Development and Engineering Application of Physical Vapor Deposition Hard Coating

本文主要讲述了我国物理气相沉积技术被开发的过程、特征以及工程应用。同时分析了我国近几年来某硬质涂层研究室在等离子体增强物理气相沉积硬质涂层的开发及工程应用工作的内容等,主要有金刚石薄膜和纳米复合涂层在我国制造业方面的应用,和分析超硬纳米复合涂层的微观结构和性能,以及探析新研发的新型大范围涂层技术在脉冲磁控溅射基础上的研发和运用。

This paper mainly describes the development process,characteristics and engineering application of physical vapor deposition technology in China.At the same time,this paper analyzes the development and engineering application of the PEPVD hard coating related to a hard coating research laboratory in recent years,mainly including the application of diamond film and nano composite coating.The microstructure and properties of superhard coatings and nanocomposite coatings were analyzed.Furthermore,the technology development of large-area coating prepared by magnetron sputtering equipment is introduced.