摘要
Over the past decade, ultraviolet(UV) detection has been a subject of major interest for both research scientists and engineers because of its important applications in both the civil and military fields. The rapid development of interdisciplinary research has enabled the realization of UV detectors based on a variety of principles. Among these devices, UV detectors based on surface acoustic wave(SAW) technology offer unique advantages of remote wireless operation capability and zero power consumption. This article provides a comprehensive review of the working principles, important parameters, and the acoustic wave and materials types used in SAW-based UV detectors. The research and development status of these detectors are discussed and the most commonly used methods to optimize device performance are also summarized. Novel types of acoustic UV detectors based on thin film bulk acoustic resonators(FBARs)and Lamb wave resonators(LMRs) are briefly introduced. Finally, future development challenges are proposed and suggestions for future directions are provided to aid the development of this important research field.
在过去数十年里,紫外探测由于在众多民生或军事领域中有诸多应用,一直以来都是一个深受科学家和工程师关注的课题.跨学科研究的快速发展使得基于多种不同原理的紫外探测器得以实现.在这些不同类型的紫外探测器中,基于声表面波(SAW)技术的紫外探测器具有允许远程无线操作和零功耗的独特优势.本文综述了基于SAW技术紫外探测器的主要工作原理、关键的性能指标以及常被使用到的一些不同种类的声波和材料,介绍了这种紫外探测器的研究和发展现状,总结了一些常用的优化器件性能的方法.另外也简单介绍了新型声波紫外探测器,例如薄膜体声波谐振器(FBARs)型声紫外探测器和兰姆波谐振器(LMRs)型声紫外探测器.最后,本文指出未来发展所面临的挑战,并对未来的发展方向提供了若干建议,希望可以促进这一重要研究领域的发展.
基金
This work was supported by China Scholarship Council,the National Natural Science Foundation of China(61974107)
Hubei Provincial Major Program of Technological Innovation(2019AAA052,2017AAA121).
