基于普通模式和电子束减速模式的加速电压对FESEM图像的影响

Impact of different acceleration voltages on FESEM images under normal mode and beam deceleration mode

为阐明加速电压对场发射扫描电子显微镜(FESEM)图像的影响,实验以4种典型材料为研究对象,比较了普通模式和电子束减速模式下不同加速电压的FESEM图像。结果表明:普通模式下,对低原子序数的样品进行FESEM表征时,宜选择较低的加速电压;对高原子序数样品或样品的内部相进行FESEM表征时,宜选择较高的加速电压。电子束减速模式在对不耐电子束的样品表征方面具有独特的优势。

The FESEM images of four typical materials with different accelerating voltages under normal mode and beam deceleration mode(BDM)are compared.The results indicate that under normal mode,when the samples are characterized by FESEM,the lower acceleration voltage is suitable for the low atomic number samples,and the higher acceleration voltage is suitable for the high atomic number samples or the internal phase of samples.The electron beam deceleration mode has an unique advantage in the characterization of the electron beam intolerance samples and the micro-morphology of the sample surface.