小腔体元器件内部气氛检测修正因子适用性分析

Analysis on Applicability of Internal Residual Gas Detection Correction Factor for Small Cavity Component

对国军标548B-2005中提出的小腔体元器件内部水汽检测修正因子进行了适用性分析。提出修正系数λ,并引入修正因子表达式中。选择三种内腔体积的管子,封入一定含量的标准气体。在相同条件下进行了内部气氛检测及修正。通过与标准气体对比,获得了λ的值,并利用Matlab软件进行分析。结果表明,内部气氛实测值随内腔体积的减小而增大,并且更离散,呈单调递减。λ在0.001~0.01 cm^3内腔体积范围内适用。但内腔体积进一步减小后,必会出现修正因子的适用性问题。

Applicability of the correction factor for the internal residual gas detection of small cavity components which was proposed by GJB548 B-2005 had been analyzed. The corrected coefficient(λ)was introduced into the expression of correction factor. Meanwhile, three packaging shells with different volume of inner cavity were chosen, and they were sealed with a certain content of standard gas sample. These devices were tested and modified under the same conditions. The values of λ were calculated by comparing the standard sample and correction results. Based on the corrected data processed in Matlab, the results showed that the measured value of vapor content tended to increase and disperse with smaller volume, and it exhibited a monotonic decline. The correction factor was applicable at 0.001~0.01 cm^3 volume of inner cavity. However, when the volume of inner cavity was further reduced, the problem of applicability of the correction factor would arise.