模板射流电沉积微制造工艺的仿真优化设计

Simulation and Optimization Design of Micro-manufacturing Process Based on Template Jet Electrodeposition

模板射流电沉积是一种微尺度加工的微成形方法,体现了增材制造的加工思想。微沉积过程中出现的沉积不均匀是阻碍增材加工过程的主要因素。通过对不同制备工艺参数下的沉积均匀性进行分析,并以有限元分析软件对阴极表面的电场分布进行了模拟,结合工艺实践得到沉积表面的电场分布规律。结果表明,采用电流密度300 A/dm^2、阴极喷嘴与阴极尺寸比例1∶1、施加屏蔽,可取得较好的均匀度,完成了对微型器件的制备。

Template jet deposition is a micro-forming method in microscale,which can reflect the processing idea of additive manufacturing.The non-uniformity of deposition in the process of microdeposition is the main factor that hinders the processing of additive materials.By the analysis of the deposition uniformity under different preparation process parameters,and using the finite element analysis software to simulate the electric field distribution of cathode surface,combining with process practice,the electric field distribution pattern of the deposition surface was obtained.The results show that using a current density of 300 A/dm^2,a anode nozzle to cathode ratio of 1∶1,and applying shielding,a better uniformity is achieved.