带载流导体微机电系统动态Pull-in阈值研究

Research on dynamic pull-in threshold of micro-electro-mechanical systems with current-carrying conductors

利用动力系统和微分方程定性理论研究了带载流导体微机电系统动态pull-in阈值。通过对系统轨线的分析,得到该系统集总参数存在唯一的阈值;分析该阈值与系统周期解、pull-in解和趋于平衡态解之间的关系,进一步得到当集总参数超过该阈值时,系统发生动态pull-in。

The dynamic pull-in threshold of the micro-electro-mechanical systems(MEMS) with current-carrying conductors is studied by using the dynamical system and differential equation qualitative theory. Through the analysis of the system orbits, it is obtained that there is a unique threshold for the lumped parameters of the system. The relationship among the threshold, the periodic solution, the pull-in solution and the equilibrium solution of the system is analyzed. Further, when the lumped parameter exceeds the threshold, the system generates dynamic pull-in.