片上集成滤光微结构的研究进展

Research Progress of Integrated Filter Microstructure on Chips

由于在传统的红外探测器系统中,滤光片与探测器是分立存在的,所以普遍存在“串色”的问题,而实现滤光片在探测器上的片上集成,可以解决这一问题。为此,国内外做了很多研究。论述了国内外关于片上集成滤光微结构的一些研究进展。

In the traditional infrared detector system,filter and detector exist separately,so the problem of“crosscolor”exists universally.The problem can be solved by integrating filter on the detector.For this reason,a lot of research has been done at home and abroad.In this paper,the research progress of on-chip integrated filter microstructures at home and abroad is reviewed.