微型晶体谐振器预封定位装置动作时序优化研究

Optimization of action sequence for micro-crystal resonator pre-sealed positioning device

针对微型晶体谐振器预封定位装置结构复杂、动作时序难以规划的问题,对微型晶体谐振器预封定位装置的动作时序,及其有限状态机模型仿真优化进行了研究。基于预封定位装置的结构,结合工艺流程要求,分析了预封定位装置各执行元件的动作、动作顺序与位置,提出了预封定位装置的性能指标;以预封定位装置传感器的状态参数和执行元件的位置为依据,设计了其动作时序;基于有限状态机理论,利用Simulink/Stateflow建立了预封定位装置的动作时序模型;依据模型仿真结果,对预封定位装置动作时序进行了优化,确定了最终动作时序;利用样机试验对预封定位装置动作时序进行了验证。研究结果表明:优化后的动作时序满足预封定位装置性能指标要求。

Aiming at the problems of complex structure and difficult to plan the action sequence of the micro-crystal resonator pre-sealed positioning device, the simulation optimization of the action sequence of the micro-crystal resonator pre-sealed positioning device and its finite state machine model was studied. Based on the structure of the pre-sealed positioning device and the requirements of the process flow, the sequence of movement and position of each actuator of the pre-sealed positioning device were analyzed, and the performance index of the pre-sealed positioning device was put forward. Based on the state parameters of the sensor and the position of the actuator of the pre-sealed positioning device, the action sequence was designed. Based on the theory of finite state machine, the action sequence model of pre-sealed positioning device was established by using Simulink/Stateflow. According to the simulation results of the model, the action sequence of the pre-sealed positioning device is optimized to determine the final action sequence, and the action sequence of the pre-sealed positioning device was verified by the prototype test. The results show that the optimized action sequence meets the performance requirements of the pre-sealed positioning device.