采用盐类化学试剂制备减反增透膜层的方法

Preparation Method of Antireflective Glass Surface via Salt Chemical Reagents

目的提高玻璃表面透过率,降低反射率。方法利用Na2CO3、Na3PO4、Na4P2O7等碱性盐溶液对预处理后的玻璃表面进行化学刻蚀,通过对玻璃表面纳米多孔结构以及断面刻蚀膜层厚度的调控,实现入射光在传递过程中产生相消干涉,从而实现对光的减反增透效果。通过扫描电镜观察玻璃腐蚀前后的表面形貌和断面膜层厚度,用紫外可见分光光度计对刻蚀前后玻璃的透过率和反射率进行测试,进一步调节刻蚀液浓度、刻蚀时间和刻蚀温度,优化实验方案,提高透过率。结果经碱性盐溶液刻蚀后,在24 h、92℃条件下,玻璃表面形成宽为20~30 nm,膜层厚度为100~150 nm,分布比较均匀的细微沟槽,玻璃的平均透过率达97.53%,比原始基片提高了7%,刻蚀前后成分基本无变化,光学性能得到了有效提高。固定刻蚀液浓度和刻蚀时间,样品透过率随刻蚀温度的升高,先增大后降低;固定刻蚀液浓度和刻蚀温度,样品透过率随刻蚀时间的增加,先增大后降低;固定刻蚀时间和刻蚀温度,样品透过率随刻蚀液浓度的增加,先增大后降低。结论采用碱性盐类化学试剂对玻璃表面进行化学刻蚀,使玻璃表面的化学键断裂,在玻璃表面形成疏松膜层结构,当刻蚀层达到一定厚度时,一定波长的光在玻璃表面发生相消干涉,可有效提高玻璃表面的透过率,降低反射率。

The work aims to improve the transmittance and reduce reflectance of the glass surface. Na2CO3, Na3PO4, Na4P2O7 and other basic salt solutions were used to perform chemical etching on the pre-treated glass. Through the regulation of the nano-porous structure on the glass surface and the thickness of the cross-section etched film, the destructive interference of incident light in the transmission process was realized, thus achieving the anti-reflection effect on light. The surface morphology and cross-section film thickness of the glass before and after etching were observed by scanning electron microscope and the transmittance and reflectance of the glass were measured by ultraviolet and visible spectrophotometer to adjust etching solution concentration, etching time and temperature, thus optimizing experiment scheme and improving transmittance. After etching by salt solution, under the experimental temperature of 92 ℃ and the experimental time of 24 hours, there was well-distributed minor grooves with width of 20~30 nm and thickness of 100~150 nm on the glass surface. The average transmittance of the glass was 97.53%, 7% higher than that of glass surface before etching. However, the glass composition hardly changed before and after etching. The optical properties of glass were effectively improved. The sample transmittance increased firstly and then decreased with the increase of the etching temperature when etching time and concentration were fixed;the sample transmittance increased firstly and then decreased with the increase of the etching time when the etching temperature and concentration were fixed;and the sample transmittance increased firstly and then decreased with the increase of etching concentration when the etching time and temperature were fixed. The chemical bonds on the glass surface are broken by etching the glass surface with salt chemical reagents, and a loose film structure is formed on the surface of the glass. When the corrosion reaches a certain thickness, destructive interference of a certain wavelength of light occurs on the glass surface, thus effectively improving the transmittance of the glass surface and reducing the reflectance.