切割用直拉硅芯原料棒工艺特点探讨

Study on the technological characteristics of the straight pulling silicon core material bar for cutting

用于切割生产硅芯的原料硅棒,一般采用CZ法生产。采用CZ法生产过程中,由于设备故障、人员操作等因素经常会产生局部不良导致提断处理,提断会导致整棒报废,损失较大,成本增加明显。结合生产实际,实验出一种融接工艺,可以使提断后硅棒继续生长,同时融接面没有隐裂、气泡等不良。经检验该工艺满足生产要求,基本可以避免提断损失。

CZ method is generally used to produce the raw material silicon rod for cutting silicon core.In the production process of CZ method,due to equipment failure,personnel operation and other factors,local defects often lead to lifting treatment,which will lead to the whole rod scrapping,great loss and significant cost increase.Combined with the production practice,a kind of fusion technology is developed,which can make the silicon rod continue to grow after lifting,and there is no hidden crack,bubble and other defects on the fusion surface.It is proved that the process can meet the production requirements and can basically avoid the lifting loss.