含籽晶石英晶组的压电效率研究

Study on piezoelectric efficiency of seeded quartz crystal group

压电传感器应用于大量矢量力测试场合,石英晶片组成的晶盒是压电传感器核心部件。晶盒由不同切型石英晶片和电极片通过一定的排布方式组成,因此石英晶片的压电性能是压电传感器研究基础。以含有籽晶的石英晶片组成的晶组的力-电转换性能为研究重点,基于光学显微拍摄分析,通过对X0°及Y0°切型籽晶晶片组成的晶组进行静态试验,得到不同类型晶组的输出特性及运用晶体物理学压电理论基础和弹性力学基础推导出籽晶晶体正压电效应矩阵。本文研究为籽晶晶片应用于压电传感器提供了参考。

Piezoelectric sensors are used in a large number of vector force testing applications,and the crystal box composed of quartz wafers is the core component of the piezoelectric sensor. The crystal box is composed of different cut quartz wafers and electrode sheets through a certain arrangement,so the piezoelectric performance of the quartz wafer is the basis of piezoelectric sensor research. The force-electric conversion performance of a crystal group consisting of quartz crystals containing seed crystals is the focus of research. Based on optical microscopy analysis,static test on crystal group composed of X0°and Y0° seed crystal. Output characteristics of different types of crystal groups are obtained. And matrix of positive piezoelectric effect of seed crystal is deduced on the basis of piezoelectric theory of crystal physics and elastic mechanics. The research provides a reference for the application of seed crystal wafers in piezoelectric sensors.