基于石墨烯的无线无源湿度传感器

Graphene-based wireless passive humidity sensor

基于石墨烯纳米材料的湿敏机理及LC无线耦合原理,设计并制作了一种无线无源湿度传感器。此传感器由低温共烧陶瓷工艺(LTCC)制作而成,包括平面螺旋电感及由石墨烯薄膜和叉指电极构成的敏感单元。当石墨烯薄膜吸附水分子后其介电常数值产生变化引起了传感器谐振频率的改变并由读取天线获取。实验结果表明:传感器谐振频率随着相对湿度的改变而线性改变,相对湿度从50%~90%RH,感湿灵敏度达到了0. 16 MHz/%RH,响应很好。

Based on the humidity sensing mechanism of graphene nanomaterials and the principle of LC wireless coupling,a wireless passive humidity sensor is designed and fabricated. The sensor is made from a low temperature co-fired ceramic( LTCC) process,including a planar spiral inductor and a sensitive element composed of graphene and interdigital electrodes. When the graphene film adsorbs water molecules,its dielectric constant changes,resulting in the change of the resonant frequency of the sensor and acquired by the reading antenna. The experimental results show that the resonant frequency of the sensor changes linearly with the change of relative humidity,while the relative humidity changes from 50 % RH to 90 % RH,the sensitivity of sensing humidity reaches 0. 16 MHz/% RH,and the esponsibility is very good.