电极参数对氧化铝陶瓷平面螺旋电感器电性能的影响

The influence of electrode parameters on the electrical properties of alumina ceramic planar spiral inductors

为了提高电感器的自谐频率,采用半导体工艺制作了一款氧化铝陶瓷平面螺旋电感器,应用网络分析仪单端头法测试平面螺旋电感器的S值,推导出它的电感值和Q值。应用有限元分析法分析了平面螺旋电感器电极宽度、电极间距、电极匝数、线圈半径等电极参数对其电感值(L)和品质因数(Q)值的影响。实验结果表明,测试结果在低频段与仿真结果具有很好的一致性,随着频率的升高,测试结果与仿真结果的差别增大,可能是因为测试过程中探头的寄生效应导致。

In order to improve the self-resonant frequency(SRF)of the inductor,an alumina ceramic planar spiral inductors was manufactured by semiconductor micromachining technology.The S-value of planar spiral inductors was tested by single port network analyzer.The L and Q value of inductor were deduced.The finite element analysis method was applied to investigate the influence of width,spacing and number of the electrode and coil size on the inductance(L)and quality factor(Q)of planar spiral inductor.The L and Q value of inductor were deduced.The measured results show coincidence on the whole of the simulated results with the tested results in the low frequency band.The difference between the test and simulation results is more and more notable with increasing frequency.We explained this is caused may by the introduced parasitic effect of probe in the process of testing.