提高场发射扫描电镜利用率的探索

On Improving the Utilization Ratio of Field Emission Scanning Electron Microscope

场发射扫描电镜被广泛应用于材料科学研究与生产实践,是材料微观分析不可或缺的重要仪器设备。该文分析总结了目前场发射扫描电镜利用率低下的原因,并结合实际工作经验,分别从操作培训、电镜开放共享、实验技术人员培训以及设备维护四个方面阐述了提高电镜利用率的有效措施。

The field emission scanning electron microscope is widely used in material science research and material production,and is of critical importance to microscopic material analysis.This paper sums up the reasons of low utilization ratio of FE-SEM,and proposes the effective measures to improve the utilization ratio of the equipment from four aspects-training of operation,opening and sharing,training of technicians,and maintenance of the equipment.