高灵敏度Si基纤毛式MEMS湍流传感器

High Sensitivity Si-Based Ciliary MEMS Turbulence Sensor

为了满足湍流探测高灵敏度、高分辨率的要求,提出了一种新型纤毛微电子机械系统(MEMS)湍流传感器。基于MEMS技术制作了硅十字梁敏感受力结构,通过橡胶探头的受力振动传递水中的湍流信号,凭借传感器头部的导流罩来保证传感器的高分辨率探测。对MEMS湍流传感器进行理论和仿真分析,其一阶共振频率达到481.04 Hz。经过海洋环境模拟机测试实验,结果显示其在50 MPa压力下保持了完好的结构和良好的性能,验证了其水下的可靠性。在湍流实验平台进行测试,通过比较标定法得出其灵敏度为1.92×10^-4 V·m·s^2/kg,满足海洋湍流测试要求。

A new ciliary micro-electromechanical system(MEMS)turbulence sensor was proposed to meet the requirements of high sensitivity and high resolution for the turbulence detection.Based on the MEMS technology,a silicon cross-beam sensitive force structure was fabricated.The turbulence signal in the water was transmitted through the vibration of the rubber probe under the force,and the high-resolution detection of the sensor was ensured by the shroud on the head of the sensor.The theoretical and simulation analyses of the MEMS turbulence sensor were made.And the result shows that the sensor has a first-order resonance frequency of 481.04 Hz.The test experiment with the marine environment simulator was carried out.And the results show that the sensor maintains an intact structure and good performance under 50 MPa pressure,verifying its underwater reliability.The test was conducted on a turbulence experimental platform,and its sensitivity was obtained to be 1.92×10^-4 V·m·s^2/kg by the comparison and calibration method,satisfying the requirements of the marine turbulence test.