激光加工中反射光偏振特性研究

Polarization Characteristics of Reflected Light in Laser Processing

激光加工中反射光损伤会对加工激光器造成损伤,为了解决大功率激光器工业应用中遇到的问题,降低反射光对激光器的损伤,对反射光偏振特性的研究意义就显得十分重大。设计了激光加工中反射光的检测方案,并对大功率半导体激光加工的反射光进行实验研究,得出半导体激光加工的反射光中S分量和P分量的光强比值与加工方式相关,还与加工材料相关,且该比值随着加工材料反射率的降低而降低。

The processed lasers are damaged by the reflected light during laser processing.For solving the problems of high power lasers in industrial applications and reducing the damage of lasers from reflected light,it is very important to study the polarization characteristics of reflected light.The detection scheme of reflected light during laser processing is designed.And the reflected light from high power semiconductor laser processing is researched.Experimental results show that the intensity ratio of S and P component of the reflected light during semiconductor laser processing is related to the processing mode and materials.And the ratio decreases with the decreasing of reflectivity of processed materials.