3ω法测试聚酰亚胺膜热导率

Measuring the Thermal Conductivity of Polyimide Film Using the 3ω Method

为准确测量聚酰亚胺薄膜的热导率,建立了一套基于3ω法的测试系统,系统由锁相放大器、信号发生器、运算放大器等部分组成。采用掩膜版方法制备金属电极,测得PI膜的热导率为0. 212 W/(m·K),测试结果与文献结果一致,证明了测试方法的可靠性。考察了不同电流条件下三倍频电压随电流频率变化规律,PI膜的热导率随温度变化的特性,在不同温度下测得的热导率值与文献结果一致。

In order to accurately measure thermal conductivity of polyimide film,a measurement system based 3ω method was established,which contains phase locked amplifier,signal generator and operational amplifier. The shadow mask method was used to prepare metal electrode,the thermal conductivity of PI film was measured to be 0. 212 W/( m·K). The test results were consistent with the results in the literature,which provides the reliability of the test method. The variation of the triple frequency vottage with current frequency on the condition of different current was investigated,PI membrane thermal conductivity properties with temperature were investigated,and the test results were consistent with the literature.