用于光谱测量仪器的高精度温压控制系统设计

Design of high-precision temperature and pressure control system for spectral measuring instrument

温度、压强作为影响光谱测量精度的主要因素,是研发高精度光谱测量仪器的研究重点。针对该问题开发了一套用于光谱测量仪器的高精度温度压强控制系统。该系统从仪器结构、电路设计和控制算法等方面进行了设计和优化,最终系统长时间温度控制精度可达0.003℃,压强控制精度达到5.34 Pa。在控压未控温条件下,该系统对体积分数为300×10-6的甲烷气体浓度测量结果波动为12.06×10-6,标准差σ为3.26×10-6;而在温压控制下,浓度测量结果波动为4.03×10-6,标准差σ为0.57×10-6。结果表明该高精度温度压强控制系统可以提高光谱测量仪器的测量精度和稳定度,同时也验证了该系统的可靠性和可行性。所提出的用于光谱测量仪器的温度压强控制系统达到了实验和生产标准,为研发同类高精度光谱测量仪器提供了借鉴和参考。

As the main factors affecting the accuracy of spectral measurement,temperature and pressure are the research focus of developing high-precision spectral measuring instrument.A high-precision temperature and pressure control system for spectral measuring instrument is developed.The system is designed and optimized from the aspects of instrument structure,circuit design and control algorithm,so the long-term temperature control accuracy of the system can reach 0.003℃,and long-term pressure control accuracy can reach 5.34 Pa.Under the condition of pressure control but without temperature control,the measurement results of methane gas concentration with a volume fraction of 300×10-6 fluctuates by 12.06×10-6and the deviationσis 3.26×10-6.While under the condition of both temperature and pressure control,the fluctuation of the corresponding measurement results is 4.03×10-6 and the deviationσis 0.57×10-6.Results show that the high-precision temperature and pressure control system can improve the measurement accuracy and stability of the spectral measuring instrument,and also verify the reliability and feasibility of the system.It is shown that the developed temperature and pressure control system for spectral measuring instrument has reached the experimental and production standards,which provides reference for the development of similar high-precision spectral measuring instrument.