一种基于PCB工艺的平面绝对式角位移传感器研究

Research on Planar Absolute Angular Displacement Sensor Based on PCB Technique

文中研究的平面绝对式角位移传感器采用PCB工艺制造定子和转子。定子PCB包含正弦形平面激励线圈和环形感应线圈,转子PCB包含改变激励线圈和感应线圈耦合系数的铜箔阵列。传感器共有2个传感通道,2个通道的重复结构周期数相差为1,共同实现绝对角位移测量。文中对该传感器进行了有限元仿真,验证了其原理可行性。样机实验表明,在0°~360°范围内传感器的原始测量误差为-104.2″~28.8″。这种基于PCB工艺的平面绝对式角位移传感器,具有结构简单、厚度小的特点,非常适合机器人关节臂等对传感器体积要求苛刻的工作场合。

The planar absolute angular displacement sensor studied in this paper employed PCB technique to manufacture the stator and rotor.The stator PCB includes a sinusoidal planar excitation coil and a circular induction coil,and the rotor PCB in⁃cludes a copper foil array that changes the coupling coefficients of the excitation coil and the induction coil.The sensor has two sensing channels,and the numbers of repeating structural periods of the two channels differs from each other,which together a⁃chieves absolute angular displacement measurement.In the research of this sensor,we implemented some simulations to verify its basic working principle.The prototype shows that the original measurement error of the sensor is-104.2″~28.8″in the range of 0°~360°.This planar absolute angular displacement sensor based on PCB technique has the characteristics of simple structure and small thickness,which is very suitable for the applications requiring small volume sensors such as a robotic joint arm.