摘要
根据光刻机光场均匀性校正器的定位控制特点,设计了阵列式音圈电机定位控制系统,提出了复合非线性反馈(CNF)结合干扰观测器(DOB)的控制算法。根据设计的控制系统物理模型,完成算法设计与仿真比较,并在实验装置中实现定位控制。仿真和实验结果表明,阵列式音圈电机定位控制系统和控制算法能够满足实际需求,且能抑制外界扰动,具有响应速度快、超调量低、定位精度高和鲁棒性强等优点。
According to the positioning control characteristics of uniform corrector for lithography,the control system for voice coil motor arrays was designed.In the design of the controller,a composite nonlinear feedback(CNF)control strategy with disturbance observer(DOB)was adopted,whose stability was theoretically proved.According to the physical model of the control system,the design and simulation of the controller was accomplished and compared,and then the positioning control experiment was completed in the device.The simulation and experimental results verify that the control system for voice coil motor arrays can achieve actual demands and suppress the external disturbance,and achieve fast response and low overshot,high positioning accuracy and robustness.
作者
王永龙
刘品宽
WANG Yonglong;LIU Pinkuan(School of Mechanical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China)
出处
《微电机》
北大核心
2020年第5期25-30,共6页
Micromotors
基金
04国家重大专项(2016ZX04002007)。
