电解法制备三氟化氮粗气成分的快速分析

Rapid analysis of composition of crude nitrogen trifluoride gas prepared by electrolysis method

在对电解法制三氟化氮(NF3)的粗气采样检测中,采用负压式自动采样装置并选用合适的干燥器采样,避免了用双联球采样方式中双联球被腐蚀而堵塞的缺陷。实验结果表明,采用负压式采样检测可有效提高采样效率和分析结果的准确性,且分析结果重复性良好,适用于电解法制备NF3电解槽粗气的快速取样分析。

During the sampling and testing the crude gas of nitrogen trifluoride (NF3) prepared by the electrolysis method,sampling by using the negative pressure automatic sampling device and selecting the appropriate dryer,the disadvantage of which the double ball is corroded and blocked in the double ball sampling mode can be avoided.The experimental results show that the negative pressure type sampling and testing can effectively improve the efficiency of the sampling and the accuracy of the analysis result,and the analysis result has good repeatability,therefore,it is suitable for rapidly sampling and analyzing of crude gas in the electrolytic cell for NF3 prepared by electrolysis method.