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扫描透射电子显微镜探针尺寸的表征

Characterization of probe size in scanning transmission electron microscopy
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摘要 在光学显微镜实验中,设备的精度直接影响实验结果的质量。一台高精度的实验装置可以得到更理想的结果,即误差较小的实验结果。因此,如何提高仪器的精度是一个值得关注的主要问题。扫描透射电子显微镜(STEM)结合了透射电子显微镜和扫描电子显微镜的原理,在成像和高分辨率分析方面具有多种强大的功能。在本文中Python可以将由STEM获取的明暗刀刃边缘实验图片做出对应的点扩散函数来表征此仪器的分辨率,即整个成像系统的水平。 In optical microscopy experiments,the accuracy of the equipment directly affects the quality of the experimental results.A high-precision experimental device can achieve better results,that is,experimental results with less error.Therefore,how to improve the accuracy of the instrument is a major issue worthy of attention.Scanning transmission electron microscopy(STEM)combines the theory of transmission electron microscopy and scanning electron microscopy to provide a variety of powerful features in imaging and high-resolution analysis.In this paper,Python can make the corresponding point spread function of the light and dark edge experimental image obtained by STEM to represent the resolution of the instrument,that is,the level of the entire imaging system.
作者 朱亚璟 黄森 Zhu Yajing;Huang Sen(Auto Inspection Center(Guangzhou)Co.,Ltd.,Guangzhou Guangdong,511340)
出处 《电子测试》 2020年第12期73-74,共2页 Electronic Test
关键词 扫描透射电子显微镜(STEM) 成像系统 点扩散函数(PSF) PYTHON Scanning transmission electron microscopy(STEM) Imaging system Point spread function(PSF) Python
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