接近接触式光刻机三点找平机构研究与应用

Research and Application of Three-point Leveling Mechanism in Proximity Contact Lithography Machine

介绍了一种接近接触式光刻机对准工作台找平机构,该机构采用三点找平,容易找平,找平力小,找平时不损伤掩模版和基片涂胶面。结构简单,性能稳定可靠,维修方便。

A kind of leveling mechanism is introduced for the alignment worktable of the proximity contact lithography machine.The leveling mechanism adopts three-point leveling,which is easy to level with small leveling force,and does not damage the mask and the substrate coating surface.The structure is simple,with stable and reliable performance,and maintenance convenient.