面向机械装备健康监测的振动传感器研究现状

Research on Vibration Sensors for Health Monitoring of Mechanical Equipment

大型机械装备的安全运行关乎国民经济的健康发展,对机械装备进行性能评估和健康监测,保证其安全、高效地运行尤为重要。应力、应变、速度、加速度、位移等振动参量作为评价机械装备运行状态的重要指标,不仅能实时反映装备的运行状态,而且能预测装备的服役寿命。因此,采集必要的结构振动信息成为机械装备健康监测中的重要环节。振动信息的采集主要依赖于多种类型的振动传感器,加速度传感器和应变传感器是机械结构健康监测中普遍使用的振动传感器,其作为诊断机械装备结构损伤的工具,能够精确收集机械装备运行过程中的振动信号。目前,关于振动传感器的研究主要集中在材料的发展、传感器性能的优化以及新技术的引入等方面。无铅陶瓷不仅符合国家的生态需求,还赋予了传感器良好的高温等特性;柔性化压电复合材料的成功研制使传感器实现了轻量化,拓宽了压电传感器的使用范围。传感器性能的优化可以通过传感器电路设计、传感器结构优化等方法来实现。此外,压电晶体的切割方式、寄生电容的存在也分别影响着压电加速度传感器和电容式加速度传感器的灵敏度。印刷技术的发展使得具有柔性基板的应变传感器制作更加方便、快速。光纤光栅应变传感器因其良好的抗电磁干扰、抗腐蚀等优点,在机械结构健康监测中发挥着重要作用。此外,自供电技术、RFID等新技术在振动传感器中的应用,使其实现了无源、低成本的非接触测量。本文综述了机械结构健康监测中常用的加速度传感器和应变传感器的特点及应用,详细分析了压电式加速度传感器和电容式加速度传感器以及电阻式传感器和光纤光栅应变传感器的发展现状,并论述了自供电振动传感器、RFID振动传感器等新型无源传感器的研究进展,探讨了振动传感器的发展趋势及应用前景,可为多种行业的机械装备健康监测提供理论与技术指导。

The safe operation of large mechanical equipment is related to the healthy development of national economy,so it is particularly important to evaluate the performance and monitor the health of mechanical equipment to ensure its safe and efficient operation.Vibration parameters,such as stress,strain,velocity,acceleration and displacement,are important indexes for evaluating the operating state of mechanical equipment.They can not only reflect the operating state of equipment in real time but also predict the service life of equipment.Therefore,collecting necessary structural vibration information becomes an important link in the health monitoring of mechanical equipment.Vibration information collection mainly relies on a variety of vibration sensors.Acceleration sensors and strain sensors are commonly used in mechanical structure health monitoring.As tools for diagnosing structural damage of mechanical equipment,they can accurately collect vibration signals during the operation of mechanical equipment.At present,the research of vibration sensor mainly focuses on the development of mate-rials,the optimization of sensor performance,the introduction of new technology and so on.Lead-free ceramics respond to the ecological needs of the country and have excellent characteristics such as good high temperature.Flexible piezoelectric composite materials make the sensor lightweight and broaden the application range of piezoelectric sensors.The optimization of sensor performance can be achieved by means of sensor circuit design and sensor structure optimization.In addition,the cutting mode of piezoelectric crystals and the presence of parasitic capacitance also affect the sensitivity of piezoelectric acceleration sensor and capacitive acceleration sensor respectively.With the development of printing technology,electronic components are easily embedded into the flexible matrix,reducing the production cost of strain gauge.Fiber Bragg grating strain sensor is playing an important role in the health monitoring of mechanical structure because of its good anti-electromagnetic interference and anti-corrosion advantages.In addition,self-powered technology,RFID and other new technologies used in vibration sensor,which achieves passive,low-cost and non-contact measurement.This paper reviews the mechanical structure commonly used in health monitoring of the characteristics and applications of the acceleration sensor and strain sensor,illustrates the development status of piezoelectric acceleration sensor,the capacitive accelerometer,the resistive sensor and the fiber Bragg grating strain sensor,also discusses the research progress of new type of passive sensors such as self-supply vibration sensors,RFID sensor etc.,discusses the development trend and application prospects of vibration sensor,which can provide a variety of industries of machinery and equipment health monitoring theory and technical guidance.