摘要
目的研究非晶碳膜的压阻性能和机理,并将其作为压敏电阻应用于MEMS压力传感器敏感电路中。方法使用直流溅射工艺制备非晶碳膜压敏薄膜材料,对典型样品进行内部组分和电学、力学、温度等性能测试和研究,使用有限元方法进行器件设计仿真,借助MEMS加工工艺完成非晶碳膜压力传感器芯片的加工,最后进行器件级别的测试和分析。结果在0~1 MPa范围内,压力传感器芯片的灵敏度为9.4μV/kPa,输出信号的非线性度为5.57%FS;对压敏电阻进行–70~150℃范围内的温度性能研究,其阻值与温度之间表现出较强的线性关系,且在–20~150℃段,线性度更强,表明非晶碳膜压敏材料在高温段应用时更容易补偿。机理研究方面,非晶碳膜在厚度方向上表现出组分差异化,因此该方向也应被纳入机理模型建立中。结论非晶碳膜在加工工艺、力学性能以及电学性能上与传统的MEMS传感器芯片能够很好地结合,加工得到的非晶碳膜压阻式压力传感器灵敏度和线性度较为理想。此外,其压阻机理研究应纳入薄膜厚度方向。
The paper aims to study the piezoresistive performance and mechanism of amorphous carbon(a-C)film and apply it in the sensitive circuit of micro-electromechanical system(MEMS)pressure sensor.In this paper,the a-C film piezoresistive material was deposited by direct-current(DC)sputtering process.The phase content and the electrical,mechanical and thermal performance of the representative sample were characterized.Then the device was designed by finite element simulation.And the a-C carbon film pressure sensor was successfully fabricated by MEMS processes to carry out test and analysis of device level.The sensitivity of the pressure sensor chip was 9.4μV/kPa and the non-linearity of output signal was 5.57%FS(full scale)in the range of 0 to1 MPa.The change of the a-C film resistor’s resistance showed linear relation at–70 to 150℃.Especially at–20 to 150℃,that relation was stronger,which showed that the temperature compensation for the a-C piezoresistive material was easier in high temperature environment.The phase content varied along the thickness-direction of the film,which implied this direction was also needed to be considered in the mechanism research.In conclusion,the a-C carbon film can be well-combined with the traditional MEMS sensor chip in terms of fabrication process,and mechanical and electrical properties.Finally,the a-C piezoresistive pressure sensor also shows satisfactory sensitivity and linearity Furthermore,the thickness-direction of a-C film should be added into the mechanism research.
作者
马鑫
张琪
郭鹏
同笑珊
赵玉龙
汪爱英
MA Xin;ZHANG Qi;GUO Peng;TONG Xiao-shan;ZHAO Yu-long;WANG Ai-ying(School of Mechanical Engineering,Xi′an Jiaotong University,Xi′an 710049,China;State Key Laboratory for Manufacturing System Engineering,Xi′an Jiaotong University,Xi′an 710049,China;Key Laboratory of Marine Materials and Related Technologies,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Science,Ningbo 315201,China;Zhejiang Key Laboratory of Marine Materials and Protective Technologies,Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Science,Ningbo 315201,China;Research Center of Materials and Photoelectricity,University of Chinese Academy of Sciences,Beijing 100049,China)
出处
《表面技术》
EI
CAS
CSCD
北大核心
2020年第6期60-67,共8页
Surface Technology
基金
国家自然科学基金(51805425)
王宽诚基金团队人才基金(GJTD-2019-13)
陕西省自然科学基金(2018JQ5018)。
关键词
非晶碳膜
压阻效应
压阻机理
MEMS
压力传感器
厚膜理论
amorphous carbon film
piezoresistive effect
piezoresistive mechanism
MEMS
pressure sensor
thick film theory