基于石墨烯-硅波导的微环光电探测器

A graphene-on-silicon waveguide photodetector using an all-pass microring

本文提出了一种基于石墨烯-硅波导的微环光电探测器。该器件采用全通型微环谐振器作为基本单元,通过优化基于石墨烯-硅波导微环谐振器的结构参数,以满足临界耦合状态需求,用于增强石墨烯与光的相互作用,并利用电子束光刻、等离子体刻蚀、石墨烯转移以及电子束蒸发等工艺制备基于石墨烯-硅波导的微环光电探测器。实验结果表明,当在偏置电压为-0.1 V时,探测器的最佳响应度Rp=12.5μA/W。

In this paper,a graphene-on-silicon waveguide photodetector using an all-pass microring is proposed.Structural parameters for the graphene-silicon microring resonator are optimized to satisfy the critical coupling condition and enhance the interaction of graphene and light.The designed graphene-on-silicon waveguide photodetectors are experimentally demonstrated by using a series of processes such as electron-beam lithography,inductively coupled plasma etching,graphene transfer,and electron beam evaporation.Experimental results show that the the best responsivity of the fabricated photodetector is 12.5 μA/W when the bias voltage is-0.1 V.