摘要
设计和加工了一台相位补偿的压电变形镜,使用干涉仪离线表征了其压电变形性能,并提出迭代全局优化算法,实现了变形镜对目标面形的快速高精度逼近。结合X射线散斑扫描技术,在光束的聚焦模式下测试了变形镜的在线相位补偿性能和对聚焦光斑尺寸的优化能力,结果显示,初始的43.4μm焦斑尺寸经相位补偿后被压缩到了12.9μm。上述研究为上海同步辐射光源的快速相位补偿提供了可能。
A piezoelectric deformable mirror for phase compensation is designed and fabricated and its piezoelectric properties are ex situ characterized by using the Fizeau interferometer.Moreover,an iterative global optimization algorithm is developed to realize a quick and accurate approach to the target figure.The in situ phase compensation performance of the mirror and its ability to optimize the focusing spot size are verified under the focusing beam mode and with the hard X-ray speckle scanning metrology.The experimental results show that the focal spot size is compressed from 43.4μm to 12.9μm after phase compensation.The research here lays a foundation for the realization of rapid phase compensation in the Shanghai Synchrotron Radiation Facility.
作者
田纳玺
蒋晖
李爱国
梁东旭
闫帅
Tian Naxi;Jiang Hui;Li Aiguo;Liang Dongxu;Yan Shuai(Shanghai Institute of Apply Physics,Chinese Academy of Sciences,Shanghai 201800,China;University of Chinese Academy of Sciences,Beijing 100049,China;Department of Advanced Imaging and Industrial Application Research,Shanghai Synchrotron Radiation Facility,Shanghai Advanced Research Institute,Chinese Academy of Sciences,Shanghai 201204,China)
出处
《光学学报》
EI
CAS
CSCD
北大核心
2020年第9期227-233,共7页
Acta Optica Sinica
基金
国家自然科学基金(11775295)
中国科学院青年促进会项目(2018295)。
关键词
X射线光学
X射线变形镜
相位补偿
X射线散斑扫描技术
硬X射线聚焦
同步辐射
X-ray optics
X-ray deformable mirror
phase compensation
X-ray speckle scanning metrology
hard X-ray focusing
synchrotron radiation
