摘要
在体声波(BAW)磁电天线结构中,磁致伸缩层中的磁性薄膜在高频磁场中产生的感生电流会引起涡流损耗,进而影响天线器件的辐射性能。为了分析和抑制磁性薄膜的涡流损耗,利用有限元仿真法建立了FeGaB磁性薄膜的涡流损耗模型,根据涡流的趋肤效应,同时讨论了磁性薄膜表面和体内的涡流损耗。采用在FeGaB中插入Al2O3薄膜的隔离方法抑制涡流损耗,比较并讨论了Al2O3薄膜的3种不同隔法,分别得到表面和体内涡流抑制的最优隔法。综合考虑总涡流损耗的影响,提出了一种“交叉隔”方式为抑制总涡流损耗的最优隔法。仿真结果表明,采用该优化方法在磁性薄膜中加入10 nm Al2O3薄膜隔离后,总涡流损耗的抑制率高于65%。
In the structure of bulk acoustic wave(BAW)magnetoelectric antenna,the induced current generated by the magnetic film in the magnetostrictive layer in the high frequency magnetic field will cause eddy current loss,which in turn affects the radiation performance of the antenna.To analyze and suppress the eddy current loss of magnetic thin films,the eddy current loss model of FeGaB magnetic thin film is established by using the finite element simulation method.According to the skin effect of eddy current,the surface eddy current and internal eddy current are discussed.And eddy current suppression is carried out by inserting Al2O3 thin film to isolate the current.Through the comparative analysis of three kinds of Al2O3 film separation methods,the optimal separation methods for the surface eddy current suppression and the internal eddy current suppression are obtained.Considering the influence of the total eddy current,a cross separation method is proposed as the optimal separation method to suppress the eddy current loss.The simulation results show that the total eddy current loss can be suppressed more than 65%by using the proposed method to insert 10 nm Al2O3 thin film into the FeGaB magnetic thin film.
作者
陈锶
高杨
任万春
彭春瑞
王姮
CHEN Si;GAO Yang;REN Wanchun;PENG Chunrui;WANG Heng(School of Information Engineering, Southwest University of Science and Technology, Mianyang 621010, China;Microsystems Center, Southwest University of Science and Technology, Mianyang 621010, China;School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China)
出处
《压电与声光》
CAS
北大核心
2020年第3期357-360,共4页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(61574131)。
