摘要
双质量块MEMS陀螺仪容易受谐振频率附近的声波干扰。为了研究双质量块MEMS陀螺仪的失效机制,建立了考虑声场分布差异和结构非对称性的失效模型。首先仿真了两种失效模式下线性扫频声波对陀螺仪输出信号的干扰,发现陀螺仪的频率响应特性存在双谐振峰。然后对型号为MUG02的双质量块MEMS陀螺仪进行了声波干扰实验,首次观察到双谐振峰现象,即分别在5.90 kHz和6.17 kHz处产生了4.65°/s和15.90°/s的伪角速度信号,实验结果验证了失效模型的正确性。
The dual-mass micor-electro-mechanical systems(MEMS)gyroscope is vulnerable to acoustic attack,if the frequency of acoustic noise is close to the resonant frequency.A failure model considering with the difference of sound distribution and structural asymmetry was developed to investigate the failure mechanism of dual-mass MEMS gyroscope.Firstly,two kinds of failure modes were simulated in frequency sweeping environment,and the double resonant peak phenomenon was observed in the frequency response characteristics.Then,an experiment was carried out on dual-mass MEMS gyroscopes,MUG02.The double resonant peak phenomenon was observed in experiment for the first time,the false angular rate signals of 4.65°/s and 15.90°/s were generated at 5.90 kHz and 6.17 kHz respectively.The experimental results verified the correctness of the proposed failure model.
作者
杨爱英
卢晨燕
郭芃
冯立辉
王佳宇
YANG Aiying;LU Chenyan;GUO Peng;FNEG Lihui;WANG Jiayu(The Laboratory of Photonics Information Technology,Ministry of Industry and Information Technology,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China)
出处
《自动化与仪器仪表》
2020年第6期6-10,共5页
Automation & Instrumentation
基金
国家自然科学基金资助项目(No.61675025)。
