摘要
基于场发射冷阴极的真空电子器件被广泛应用于通讯、医疗、安全监测等领域,本文主要回顾了近年来场发射冷阴极及其真空电子器件的最新研究进展,介绍了现行冷阴极中使用的低维纳米材料和新型复合式结构,详细探讨了场发射冷阴极在微波管、电子显微技术、X射线管及真空纳米间隙晶体管中的应用现状。最后,着重阐述了真空电子微系统的科学概念,并对未来的应用前景进行了展望。
Field emission cold-cathode plays an important role in the fields of communication,medication and security detection.In this paper,the latest progresses in cold-cathode and the related vacuum electronic devices were reviewed.Firstly,the nano-materials and hybrid nanostructures utilized in current cold-cathode were presented.Furthermore,the application status of cold-cathode in microwave tubes,electron microscope techniques,X-ray tubes and nanoscale vacuum channel transistors were discussed in detail.Finally,the scientific concept of vacuum electronic microsystem was emphasized,providing its prospect for the future research.
作者
徐季
张建
李孟杰
史永佼
施予同
吴量
李新宇
张晓兵
XU Ji;ZHANG Jian;LI Meng-jie;SHI Yong-jiao;SHI Yu-tong;WU Liang;LI Xin-yu;ZHANG Xiao-bing(International Cooperation Laboratory for Information Display and Visualization,School of Electronic Science and Engineering,Southeast University,Nanjing 210096,China)
出处
《真空电子技术》
2020年第3期1-14,共14页
Vacuum Electronics
基金
国家自然科学基金面上项目(批准号:61971133)
国家自然科学基金青年科学基金(批准号:61571124)
“政府间国际科技创新合作/港澳台科技创新合作”重点专项(批准号:2018YFE0125500)
中国博士后基金面上项目(批准号:2019M651646)。
关键词
场发射冷阴极
真空微纳电子器件
低维纳米材料
微纳加工工艺
真空微系统
Field emission cold cathode
Vacuum micro-nano electronic devices
Low dimensional nanomaterials
Micro-nano fabrication
Vacuum microsystem