BME680压力传感器非线性补偿和温度补偿方法及实现

Method and Implementation of Nonlinear Compensation and Temperature Compensation for BME680 Pressure Sensor

为了提高微机电系统(MEMS)压力传感器的测量精度,研究了压力传感器非线性补偿和温度补偿算法,提出了一种基于单片机的传感器非线性矫正方法,设计了一款集成数据采集系统、修正系统和传输系统的柔性压力片。采用一款商用MEMS压力传感器BME680进行了试验,利用Matlab软件对采集的数据进行分段多项式拟合,基于压力片MCU实现传感器误差的非线性补偿和实时修正。试验结果表明,温度补偿算法效果明显,压力传感器的静态输出精度提高明显,10℃及10℃以上,提高到0.207%FS;10℃以下,提高到1.39%FS,达到了预期要求。

In order to improve the measurement accuracy of MEMS pressure sensor,the nonlinear compensation and tem⁃perature compensation algorithms of the pressure sensor were studied,a nonlinear correction method of sensor based on single chip microcomputer was proposed,a flexible pressure sheet with integrated data acquisition system,correction sys⁃tem and transmission system was designed.Finally,a commercial MEMS pressure sensor BME680 was used to test,the piecewise polynomial fitting of the collected data was carried out by using Matlab software,and the nonlinear compensa⁃tion and real-time error correction of the pressure sensor based on MCU chip were realized.The results show that the tem⁃perature compensation algorithm is effective,the static output accuracy of the pressure sensor was increased to 0.207%FS at 10℃and above,and increased to 1.39%FS below 10℃,which meet the expected requirements.