某玻璃基板加工厂房净化空调系统设计

Clean air conditioning system design for a glass substrate processing plant

介绍了空调冷热源、水系统、风系统及自控系统的设计。基于该项目的实际需求,在ISO 5级洁净室采用了非单向流的气流组织,并采用了温度、相对湿度和洁净度独立控制等技术措施,在满足环控目标的同时节约了初投资和运行费用。项目已成功通过验收测试并实际运行了3 a,所有洁净室的室内参数均满足设计要求,可为同类工程的设计提供参考。

Presents the design of the air conditioning cold and heat source,water system,air system and automatic control system.Based on the actual demands of the project,adopts the non-unidirectional flow in ISO level 5 clean rooms,the independent control of temperature,relative humidity and cleanliness,and other technical measures to meet the environmental control objectives and reduce the initial investment and operating costs as well.The project has successfully passed the acceptance test and been in operation for three years.All the indoor parameters of the clean rooms meet the design requirements.The project design can provide reference for the similar projects.