光学元件的疵病检测及现状

Defect detection and current situation of optical components

介绍了光学元件的疵病类型以及疵病检测标准,全面介绍了光学元件疵病检测方法的国内外发展现状。归纳出目前光学元件的疵病检测标准和检测方法的发展趋势及关键技术。分析表明,目前已有的疵病检测方法中还缺乏一种检测手段可以做到对所有类型疵病实现所需精度的检测,并且由于视场受限、难以定量等技术障碍而无法建立高效、自动化的检测分析设备。

This paper briefly introduces the types of defects in optical elements and their detection standards.The development status of optical element defect detection methods at home and abroad is introduced.The development trend and key technologies of current optical element defect detection standards and methods are summarized.The analysis shows that the existing defect detection methods lack of a detection method to achieve the required precision detection of all types of defects.Due to limited field of view,quantitative and other technical obstacles,it is impossible to establish efficient,automated detection and analysis equipment.