仿蟋蟀尾毛的MEMS振动传感器有限元仿真分析

Finite Element Simulation Analysis of MEMS Vibration Sensor Inspired by the Cricket Tail Hair

基于MEMS技术和仿生学设计了一种纤毛+薄膜振动传感器敏感结构,由垂直纤毛和两个相互垂直的悬臂梁构成信息接收和传递单元,沉积在与悬臂梁末端固连的硅衬底薄膜上的PZT压电薄膜作为敏感转化单元.建立了该传感器结构的等效运动模型,在此基础上对传感器的输出特性和频率特性进行了数学分析.利用ANSYS有限元软件对不同结构及几何参数的敏感结构进行了仿真分析,对比仿真结果,优化传感器的结构和几何参数.仿真结果表明该结构传感器共振频率达到了6757.4 Hz.

The sensitive structure vibration sensor is designed by using cilia and thin film,which was based on MEMS technology and bionics.The sensor contains the information receiving and transmitting unit that consist of vertical cilia and two perpendicular cantilever beams,and the sensitive conversion unit which was made by the PZT piezoelectric film with the silicon substrate film fixed to the end of the cantilever beam.This paper established the equivalent motion model of the sensor structure to make mathematically analysis in the output characteristics and frequency characteristics of the sensor.According to the simulation results of different structure and geometric parameters by using ANSYS,the structure and geometric parameters of the sensor can be improvement.From above simulation results,the resonant frequency of the sensor can reach to 6757.4 Hz.