射频等离子体飞行熔化制备石英玻璃微球研究

Study on Preparation of Quartz Glass Microspheres by RF Plasma Flying Melting

为了探究等离子体在玻璃熔制中的应用,采用射频等离子体对二氧化硅原料进行熔化,制备石英玻璃微球,研究了不同原料粒径、进料速率、分散气体流量下原料的熔化情况。利用X射线衍射(XRD)、扫描电镜(SEM)、超景深三维显微镜、综合热分析(TG-DSC)等手段对样品进行表征。结果表明,较高的原料进料速率和较大的原料粒径导致样品的玻璃化程度和球化率降低,1 L/min的分散气体流量有利于玻璃化程度和球化率的提高。

In order to study the application of plasma in glass melting,RF plasma was employed to melt and prepare quartz glass microspheres.The influences of particle size,feed rate and flow rate of dispersion gas on the melting behavior were investigated.The samples were characterized by X-ray diffraction(XRD),scanning electron microscope(SEM),super depth of field three-dimensional microscope,and comprehensive thermal analysis(TG-DSC).Results show that higher feed rate and larger particle size lead to lower vitrification degree and the spheroidization rate of quartz glass microspheres,1 L/min of dispersion gas which are beneficial to increase the vitrification degree and the spheroidization rate of quartz glass microspheres.