溅射时间对Cp/AlSn复合减摩镀层组织及性能的影响

Effect of Sputtering Time on Microstructure and Properties of Cp/AlSn Composite Anti Friction Coating

为研究溅射时间对一种新型Cp/AlSn纳米自润滑复合镀层组织及性能的影响,文中采用磁控溅射离子镀技术在轴承合金表面制备Cp/AlSn复合减摩镀层。利用扫描电子显微电镜(SEM)、X射线衍射(XRD)技术对镀层组织结构、组成份及截面形貌进行检测分析,并对镀层的硬度和膜基结合力进行了测试。研究结果表明:镀层表面是典型岛团状聚集态,并向层状转变。镀层中Al相沿(111)面择优生长,Sn相沿(400)面择优生长,C为非晶衍射不明显,C元素掺杂使镀层具有自润滑性。随着溅镀时间的增加,镀层厚度和硬度逐渐增大。当溅射时间为30min时,镀层厚度为3.3μm,硬度最大为146.96HV。溅镀时间为20min时,镀层的膜基结合力最高为21.0N。

The effect of sputtering time on the microstructure and properties of a new type of Cp/AlSn nano self lubricating composite coating is studied.A Cp/AlSn composite antifriction coating was prepared on the surface of bearing alloy by magnetron sputtering ion plating.Scanning electron microscopy(SEM)and X ray diffraction(XRD)were used to analyze the microstructure,composition and cross section of the coating,with its hardness and film bonding strength tested.The results show that the surface of the coating was a typical island like aggregate state and transformed into a layer.In the coating,the Al phase grew preferentially along the(111)plane and the Sn phase grew preferentially along the(400)plane.C was amorphous and the diffraction was not obvious,and the doping of C element made the coating self lubricating.As the sputtering time increased,the thickness and hardness of the coating gradually increased.When the sputtering time was 30 min,the plating thickness was 3.3μm and the hardness was at most 146.96 HV.When the sputtering time was 20 min,the film based bonding force of the coating was up to 21.0 N.