微型磁通门纳米孔薄膜铁芯微观结构改进方案

Microstructure Improvement of Nanoporous Film Core for Micro Fluxgate

针对薄膜铁芯传统制作方法所得纳米孔洞结构的分布与尺度完全随机不可控的问题,提出了微型磁通门纳米孔薄膜铁芯微观结构改进方案。该方案采用二步阳极化法进行多孔氧化铝模板生长,并在模板基础上完成可控的纳米多孔软磁薄膜的制备。实验验证结果表明,薄膜铁芯中的纳米多孔微结构,能够降低铁芯的磁畴体积和磁畴间的相互作用数量,从而有效改善薄膜铁芯的磁性能,降低器件噪声。

Aiming at the problem of randomness and uncontrollability of the distribution and scale of nano-holes obtained by traditional fabrication methods of nano-film core,an improved scheme of micro-fluxgate nano-porous film core structure was proposed.In this method,porous alumina templates were grown by two-step anodization method,and controllable nanoporous soft magnetic films were prepared on the basis of templates.The experimental results showed that the nanoporous microstructures in the thin film core could reduce the domain volume and the number of interaction between magnetic domains,thus effectively improved the magnetic properties of the thin film core and reduced device noise.This method provided a feasible micro-improvement idea for the optimization of soft magnetic thin film core.