基于钽酸锂晶片的太赫兹热释电探测器

Terahertz Pyroelectric Detector Based on LiTaO3 Wafer

针对自由空间和波导传输太赫兹辐射功率兼容测试的需求,开展了光敏面直径为10 mm的多功能太赫兹热释电探测器的相关研究。通过有限元分析及热电耦合仿真设计,建立了敏感元件由100μm厚的钽酸锂(LiTaO3)晶片和碳纳米管吸收层组成的太赫兹热释电探测器模型;采用优化的精确减薄抛光和剥离等关键工艺,重点攻克了采用大晶片多阵列方式制作LiTaO3基太赫兹热释电探测器敏感元件的工艺难题,并完成了太赫兹热释电探测器的研制。在设定条件下,该探测器的响应度为371.8 V/W,噪声等效功率为0.34 nW/Hz^1/2。实验结果表明,设计并制作的太赫兹热释电探测器的集成度高、响应度良好、噪声等效功率低,能够有效解决大光斑太赫兹光束功率测试问题。

Aiming at the requirements of terahertz radiation power compatibility test for free space and waveguide transmission,a multi-function terahertz pyroelectric detector with a photosensitive surface diameter of 10 mm is studied.By means of the finite element analysis and the thermoelectric coupling simulation design,the model of terahertz pyroelectric detector,whose sensitive element is composed of the LiTaO3 wafer with the thickness of 100 m and the carbon nanotubes absorption layer,is established;the process problem of using the large wafer and multi-array method to manufacture the sensitive components of LiTaO3-based terahertz pyroelectric detector is solved,and the development of terahertz pyroelectric detector is completed by using key processes such as optimized precise thinning,polishing and Lift-Off.Under the setting conditions,the responsivity of the terahertz pyroelectric detector is 371.8 V/W,and the noise equivalent power is 0.34 nW/Hz^1/2.The experimental results show that the designed and manufactured terahertz pyroelectric detector has high integration,good responsivity and low noise equivalent power,which can effectively solve the power test problem of terahertz beams with large light spots.