柔性应力传感器综合性实验设计

Design on comprehensive experiment of flexible piezoelectric strain sensors

将前沿科研成果转化为本科开放性实验教学内容,设计了一种柔性应力传感器综合性实验。通过采用化学气相沉积法合成氧化锌(ZnO)微米线,并制备了基于单根微米线的压电应力传感器。通过实验结果发现,器件具有很好的稳定性和重复性,在2.17%的张应力下器件的敏感度计算为1149.63。实践表明,该综合性实验融合了材料生长、材料表征、器件制备与器件性能表征等多方面知识,不仅激发学生对专业知识的学习兴趣,同时也能够培养学生的自主学习能力、动手操作能力和创新思维能力。

In order to transform scientific research achievements into experimental teaching contents,we design a comprehensive experiment of a piezoelectric strain sensor.A piezoelectric strain sensor is produced based on one-dimensional(1D)ZnO microwires which are grown by chemical vapor deposition(CVD)method.Experiment results show that the device have good stability and repeatability.The sensitivity of the device is calculated about 1149.63 under the 2.17%tensile stress.The practice shows that the comprehensive experiment integrate the knowledge of material growth,material characterization,device fabrication and device performance characterization,not only stimulate students interest in learning professional knowledge,but also foster students autonomous learning ability,operational capacity and innovative ability.