激光辐照对Ag/AZO双层复合透明导电薄膜性能的影响

Effect of laser irradiation on performance of Ag/AZO double-layered composite transparent conductive film

通过磁控溅射在掺铝氧化锌(AZO)透明导电玻璃表面沉积了10 nm厚的Ag层,得到Ag/AZO双层复合透明导电薄膜,然后利用532纳秒脉冲激光器对其进行辐照处理。考察了激光能量密度对薄膜形貌、结构及综合光电性能的影响。考察了激光辐照处理后Ag/AZO双层复合透明导电薄膜的方块电阻、透光率、反射率及品质因子,并通过扫描电镜和X射线衍射仪分析了它们的表面形貌和晶体结构。结果表明,当激光能量密度为0.6 J/cm^2时,薄膜的方块电阻为9.26Ω,在400~800 nm波段的平均透光率为88.38%,平均反射率为11.69%,品质因子为3.14×10^−2Ω^−1,表现出最优的综合光电性能。

A silver/aluminum-doped zinc oxide(Ag/AZO)double-layered composite transparent conductive film was form by magnetron sputtering a 10-nm-thick Ag film on the surface of AZO transparent conductive glass,and then irradiated using a 532 nm nanosecond pulsed laser.The effect of laser fluence on the morphology,structure,and comprehensive photoelectric performance of the thin film was studied.The sheet resistance,transmittance,reflectance,and the figure of merit of the laserirradiated Ag/AZO double-layered composite transparent conductive films were tested,and their surface morphologies and crystal structures were analyzed by scanning electronic microscopy and X-ray diffractometry.The results showed that the film irradiated at a laser fluence of 0.6 J/cm^2 had a sheet resistance of 9.26Ω,an average transmittance of 88.38%and an average reflectance of 11.69%within the wavelength range from 400 nm to 800 nm,and a figure of merit of 3.14×10^−2Ω^−1,showing the best comprehensive photoelectric performance.