基于相衬成像的X射线波面检测装置控制系统设计及仿真

Control System Design and Simulation of X-Ray Wavefront Detection Device Based on Phase Contrast Imaging

随着第三代同步辐射和自由电子激光光源以及光束线技术的发展,越来越多的掠入射式反射镜投入到使用中。这种掠入射式反射镜是一种大尺寸的高精度光学表面。这种反射镜的面型误差与实验中用到的光束线焦点尺寸相互关联。X射线波面检测装置主要是通过X射线相衬成像技术实现对反射镜的面型检测。主要介绍了X射线波面检测装置的实验原理、控制系统搭建、软件实现、图像处理算法、相位步进方法、相移信息提取仿真实验。通过进行相移信息提取仿真实验确保实验的准确性。对比分析不同的图像处理算法进而达到精确实验结果。设计目标是X射线波面检测装置面型检测分辨率达到100nrad。

With the development of the third generation synchrotron radiation,free electron laser source and beam line technology,more and more grazing incidence mirrors are put into use.This kind of grazing incidence mirror is a large size and high precision optical surface.The surface error of the mirror is closely related to the focal size of the beam line used in the experiment.The X-ray wavefront inspection device mainly realizes the surface inspection of the mirror through the phase contrast imaging technology.This paper mainly introduces the experimental principle,control system construction,software implementation and image processing algorithm of X-ray wave surface reflection device.Through the analysis of different image processing algorithms to achieve the purpose of accurate experimental results.The design goal of this project is to achieve 100 nrad resolution of X-ray wavefront detection device.