浅谈液晶显示工厂化学品集中供应系统

Brief Description of Central Chemical Supply System in Liquid Crystal Display Factories

液晶面板生产过程中,由于工艺要求,需要用到大量化学品,主要包括酸、碱、有机、研磨液等,化学品在管道中靠压力驱动,具有一定的泄漏喷溅风险,因此化学品集中供应系统从设计、施工、调试到验收等环节均需要很高的专业程度,本文简介了化学品集中供应系统的设计参数、施工流程、系统构成及安装调试等内容,全面论述了如何在液晶面板厂中高效、稳定、安全的供应化学品。

A variety of chemicals are widely used in semiconductor and LCD(liquid crystal display)factories,which are necessary in cleaning,etching,stripping and developing process,and it could consume over thousand tons per month.As a result,the safety and continuity of the CCSS(Central Chemical Supply System)are extremely vital,any inappropriate operations or mistakes may lead to serious consequences,as casualties,breakdowns or quality problems.In order to control the particulate cleanliness of chemicals,the process of design,construction,operation and automatic safety system of CCSS was discussed.