基于耦合腔的太赫兹垂直传输结构

Terahertz vertical transition structure based on coupling cavity

提出了一种工作在110 GHz的耦合腔垂直传输结构。在垂直金属腔的两端对称地装配两个模式变换单元,作为波导的两个激励端口。模式变换单元在50μm厚度石英基片上实现,该基片采用通孔结构和双面镀金工艺。因此,该垂直传输结构在太赫兹频段具有较低的插入损耗。仿真结果与测试结果拟合良好,模式变换单元的S21仿真结果为-0.7 dB,测试结果小于-1.3 dB,在105~116 GHz带宽的反射系数低于-10 dB。

The paper proposed a cavity-coupled vertical transition structure working at 110 GHz.Two mode-transition units were fabricated at ends of a vertical metal cavity symmetrically,acting as two excitation ports of a waveguide.The proposed mode-transition unit was realized on a 50-μm thick quartz-substrate with via holes and double-side patterned.In this way,the vertical transition structure presented a low insertion loss at terahertz frequency.Good agreement between simulated and measured results was obtained.The simulated S21 of the mode-transition unit was-0.7 dB,the measured S21 was less than-1.3 dB.The bandwidth from 105 GHz to116 GHz was obtained for reflection level lower than-10 dB.