光刻机精密运动框架的一体化设计与3D打印制造

Integrated Designing and 3D Printing of Precision Motion Frame in Mask Aligner

作为新兴的制造技术,3D打印不仅是产品创新的利器,更是高端装备制造的重要研究方向。研究遵循电子束熔覆工艺特点,以零件结构与功能需求为正向切入点,借助CAD和CAE工具,对光刻机工件台现有精密运动框架进行二次设计。理论计算表明:与原零件相比,3D打印运动框架重量减轻69%,模态基本保持不变。这一结果证明了提出的3D打印高性能光刻机零件设计与制造方法的科学性。

As a newly developing manufacturing technique,3D printing is not only a useful tool for product innovation,but also an important developing orientation in the advanced equipment manufacturing industry.Based on the process feature of 3D printing,the present study focused forward on the structural and functional requirements,and redesigned the precision motion frame used on the Part Stage via both CAD and CAE tools.Theoretical analysis indicated that compared to traditional frame,the mass of the 3D-printed one is 69% lower while their modality almost kept unchanged,proving the validity of the proposed method for redesigning and manufacturing 3D-printed high-quality parts in the Mask Aligner.