基于FluidSIM的光刻机气动回路仿真分析

Simulation Analysis of Pneumatic Circuit of Lithography Machine Based on FluidSIM

用于加工芯片的光刻机,气动回路设计依据消障过后的X-D状态图,绘制了系统逻辑原理图。利用FluidSIM软件,按照动作顺序,搭建气动控制回路进行运行仿真。各气缸的仿真状态图显示,所有动作符合设计要求,达到了预期效果。

The pneumatic circuit design of the lithography machine for chip processing is based on the X-D state diagram after the elimination of obstacles.The system logic schematic diagram is drawn.The pneumatic control circuit is built and operated according to the action sequence by FluidSIM software.Through the simulation state diagram of each cylinder,all actions meet the design requirements and achieve the expected effect.