摘要
为抑制激光散斑现象,利用时间平均抑制散斑理论的基本思想,设计了一个具有高透射率、随机相位功能的超表面结构,并结合MEMS技术实现了微纳旋转载台的设计制造,实现了超小型的散斑抑制器件制造.实验结果显示激光散斑对比度可降低至2.63%,满足激光投影领域使用需求.该激光散斑抑制器件使用方法简单、能量利用率高、成本低且易于批量制造.
In order to suppress laser speckle,a metasurface structure with high transmittance and random phase function is designed,which utilizing the basic idea of time-averaged suppression speckle theory.Then integrated with MEMS technology,the design and manufacture of micro-rotation stages is realized,and to achieve a ultra-small speckle suppression device.The experimental results show that the laser speckle contrast can be reduced to 2.63%,which meets the needs of laser projection.This novel laser speckle suppression device is simple in use,high in energy utilization rate,low in cost,and easy to massproduce.
作者
程进
周顺
孙雪平
蒲欣欣
孙其梁
徐英舜
刘卫国
CHENG Jin;ZHOU Shun;SUN Xue⁃ping;PU Xin⁃xin;SUN Qi⁃liang;XU Ying⁃shun;LIU Wei⁃guo(School of Photoelectric Engineering,Xi'an Technological University,Xi'an 710021,China;Wuxi V⁃Sensor Technology Co.,Ltd,Wuxi,Jiangsu 214101,China;School of Biomedical Engineering and Technology,Tianjin Medical University,Tianjin 300072,China)
出处
《光子学报》
EI
CAS
CSCD
北大核心
2020年第7期178-183,共6页
Acta Photonica Sinica
基金
国防基础科研项目(No.JCKY2016208A002)。
关键词
激光显示
散斑抑制
可调超表面
随机相位
微机电
Laser display
Speckle suppression
Tunable metasurface
Random phase
MEMS