短/超短脉冲激光诱导等离子体微加工研究进展

Advances of Short and Ultrashort Pulse Laser Induced Plasma Micromachining

当高强度短/超短脉冲激光聚焦于靶材表面或介质内部时,若其峰值功率密度超过某一阈值,靶材表面或介质内部会形成等离子体,等离子体与工件相互作用进行材料去除,这一过程称为激光诱导等离子体微加工(LIPMM)。这一加工技术可以高效吸收激光能量,具有损伤小、效率高、应用广等特点,已被广泛应用于微加工领域。为此介绍了LIPMM的微加工原理,进一步阐述了以固体为靶材和以液体为介质的LIPMM的研究进展,对LIPMM未来所面对的问题和发展方向进行了总结和展望。

When the peak power density of a short or ultrashort pulse laser exceeds the ionization threshold of the solid target or liquid medium,a plasma will be formed on the surface of the target or inside the medium,leading to the remove of the workpiece by the interaction between the plasma and the workpiece,which is called laser induced plasma micromachining(LIPMM).This processing technology is characterized by high absorption of laser energy,low damage,high efficiency and wide application,which has been widely used in the field of micromachining.The machining principle of LIPMM was firstly introduced in this paper,and the new techniques and applications of LIPMM in solid target and liquid medium were then mainly elaborated.The challenges and future trends of the development of LIPMM were finally summarized and prospected.